JPH0359624U - - Google Patents
Info
- Publication number
- JPH0359624U JPH0359624U JP11993889U JP11993889U JPH0359624U JP H0359624 U JPH0359624 U JP H0359624U JP 11993889 U JP11993889 U JP 11993889U JP 11993889 U JP11993889 U JP 11993889U JP H0359624 U JPH0359624 U JP H0359624U
- Authority
- JP
- Japan
- Prior art keywords
- target
- target material
- sputtering
- parts
- permanent magnet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004544 sputter deposition Methods 0.000 claims description 7
- 239000013077 target material Substances 0.000 claims description 7
- 239000000696 magnetic material Substances 0.000 claims 2
- 239000010409 thin film Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Thin Magnetic Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11993889U JPH0359624U (en]) | 1989-10-13 | 1989-10-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11993889U JPH0359624U (en]) | 1989-10-13 | 1989-10-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0359624U true JPH0359624U (en]) | 1991-06-12 |
Family
ID=31668033
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11993889U Pending JPH0359624U (en]) | 1989-10-13 | 1989-10-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0359624U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007068468A (ja) * | 2005-09-07 | 2007-03-22 | Kubota Corp | 田植機の植付け機構 |
-
1989
- 1989-10-13 JP JP11993889U patent/JPH0359624U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007068468A (ja) * | 2005-09-07 | 2007-03-22 | Kubota Corp | 田植機の植付け機構 |
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